Mechanical strength of oxygen-doped float-zone silicon crystals

Koji Sumino, Ichiro Yonenaga, Atsushi Yusa

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

The characteristics of the mechanical properties of float-zone silicon crystals doped with oxygen at concentrations of 1.01.5×1017 cm−3 are investigated. The strength of the doped crystals is measured to be considerably higher than that of ordinary float-zone crystals. The high strength of such doped crystals is found to be retained even after heat-treatment at 1050°C, which softens Czochralski silicon crystals drastically.

Original languageEnglish
Pages (from-to)L763-L766
JournalJapanese journal of applied physics
Volume19
Issue number12
DOIs
Publication statusPublished - 1980 Dec

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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