The characteristics of the mechanical properties of float-zone silicon crystals doped with oxygen at concentrations of 1.01.5×1017 cm−3 are investigated. The strength of the doped crystals is measured to be considerably higher than that of ordinary float-zone crystals. The high strength of such doped crystals is found to be retained even after heat-treatment at 1050°C, which softens Czochralski silicon crystals drastically.
ASJC Scopus subject areas
- Physics and Astronomy(all)