TY - JOUR
T1 - Mechanical strength of oxygen-doped float-zone silicon crystals
AU - Sumino, Koji
AU - Yonenaga, Ichiro
AU - Yusa, Atsushi
PY - 1980/12
Y1 - 1980/12
N2 - The characteristics of the mechanical properties of float-zone silicon crystals doped with oxygen at concentrations of 1.01.5×1017 cm−3 are investigated. The strength of the doped crystals is measured to be considerably higher than that of ordinary float-zone crystals. The high strength of such doped crystals is found to be retained even after heat-treatment at 1050°C, which softens Czochralski silicon crystals drastically.
AB - The characteristics of the mechanical properties of float-zone silicon crystals doped with oxygen at concentrations of 1.01.5×1017 cm−3 are investigated. The strength of the doped crystals is measured to be considerably higher than that of ordinary float-zone crystals. The high strength of such doped crystals is found to be retained even after heat-treatment at 1050°C, which softens Czochralski silicon crystals drastically.
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U2 - 10.1143/JJAP.19.L763
DO - 10.1143/JJAP.19.L763
M3 - Article
AN - SCOPUS:0012346177
VL - 19
SP - L763-L766
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 12
ER -