TY - JOUR
T1 - Mechanical resonant magnetic sensor utilizing magnetically induced compressive load from magnetostrictive material
AU - Inomata, Naoki
AU - Ezura, Taiga
AU - Van Toan, Nguyen
AU - Ono, Takahito
N1 - Funding Information:
Part of this research was performed at the Micro/Nanomachining Research Education Center and the Nishizawa Center of Tohoku University.
Publisher Copyright:
© 2019 The Institute of Electrical Engineers of Japan.
PY - 2019
Y1 - 2019
N2 - A novel magnetic sensor composed of a silicon mechanical resonator and a magnetostrictive material is proposed, fabricated, and theoretically and experimentally evaluated. The sensor’s measurement principle relies on the resonant-frequency change caused by a magnetically-induced compressive load resulting from a change in the size of the magnetostrictive material; the material expands upon application of an external magnetic field, and the resulting compressive load on the resonator changes its resonant frequency. The theoretical magnetic sensitivity and magnetic response are calculated based on material mechanics and thermomechanical noise. In our experiments, we evaluate the frequency response and fluctuation. The resonant frequency of the sensor linearly decreases as the magnetic field increases, which corresponds to a theoretical equation. The experimental magnetic resolution is 1.56×10 -4 T, while the theoretical one is 4.62×10 -10 T. This difference between theory and experiment is due to the low frequency stability of the device. The device sensitivity is improved by reducing the frequency fluctuation and sensor size. Our results indicate the feasibility of performing high-sensitivity measurements using the proposed mechanical resonant magnetic sensor.
AB - A novel magnetic sensor composed of a silicon mechanical resonator and a magnetostrictive material is proposed, fabricated, and theoretically and experimentally evaluated. The sensor’s measurement principle relies on the resonant-frequency change caused by a magnetically-induced compressive load resulting from a change in the size of the magnetostrictive material; the material expands upon application of an external magnetic field, and the resulting compressive load on the resonator changes its resonant frequency. The theoretical magnetic sensitivity and magnetic response are calculated based on material mechanics and thermomechanical noise. In our experiments, we evaluate the frequency response and fluctuation. The resonant frequency of the sensor linearly decreases as the magnetic field increases, which corresponds to a theoretical equation. The experimental magnetic resolution is 1.56×10 -4 T, while the theoretical one is 4.62×10 -10 T. This difference between theory and experiment is due to the low frequency stability of the device. The device sensitivity is improved by reducing the frequency fluctuation and sensor size. Our results indicate the feasibility of performing high-sensitivity measurements using the proposed mechanical resonant magnetic sensor.
KW - MEMS
KW - Magnetic sensor
KW - Magnetostrictive material
KW - Mechanical resonator
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U2 - 10.1541/ieejsmas.139.21
DO - 10.1541/ieejsmas.139.21
M3 - Article
AN - SCOPUS:85060988246
VL - 139
SP - 21
EP - 26
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 1
ER -