TY - JOUR
T1 - Mechanical hardening of electrochemically deposited aluminum from chloroaluminate ionic liquid
AU - Al Farisi, Muhammad Salman
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Funding Information:
This study was supported by Japan Society for the Promotion of Science (JSPS) KAKENHI grant-in-aid for young scientist no. 19J11122 and the Division for Interdisciplinary Advanced Research and Education, Tohoku University. The authors acknowledge Dr. Takamichi Miyazaki from the Department of Instrumental Analysis, Graduate School of Engineering, Tohoku University for assistance in EBSD/TEM analysis. The authors also acknowledge Mr. Masatoshi Tanno from the New Industry Creation Hatchery Center (NICHe), Tohoku University for assistance in nanoindentation testing. A part of the experiments were performed in the Micro/Nano Machining Research and Education Center (MNC), Tohoku University.
Publisher Copyright:
© 2022 Acta Materialia Inc.
PY - 2022/5
Y1 - 2022/5
N2 - In establishing electrochemically deposited Al as a structural microdevice, its surface uniformity and mechanical properties such as the hardness are of great importance. In this study, an improvement of surface uniformity and mechanical hardening of the film by factors of about 100 and 4, respectively, are reported. Both were associated to the grain size effect, which is attributed to the inclusion of 2-chloronicotinyl chloride additive acting as a grain growth inhibitor in the electrochemical bath. Other important properties, such as the elastic modulus, residual stress and electrical resistivity of the deposit are also studied. This study holds a great potential to pave the way for the utilization of the electrochemically deposited Al in microsystems and related technologies.
AB - In establishing electrochemically deposited Al as a structural microdevice, its surface uniformity and mechanical properties such as the hardness are of great importance. In this study, an improvement of surface uniformity and mechanical hardening of the film by factors of about 100 and 4, respectively, are reported. Both were associated to the grain size effect, which is attributed to the inclusion of 2-chloronicotinyl chloride additive acting as a grain growth inhibitor in the electrochemical bath. Other important properties, such as the elastic modulus, residual stress and electrical resistivity of the deposit are also studied. This study holds a great potential to pave the way for the utilization of the electrochemically deposited Al in microsystems and related technologies.
KW - Aluminum
KW - Electroplating
KW - Grain boundary strengthening
KW - Ionic liquid electrolyte
KW - Microstructure
UR - http://www.scopus.com/inward/record.url?scp=85124671388&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85124671388&partnerID=8YFLogxK
U2 - 10.1016/j.scriptamat.2022.114599
DO - 10.1016/j.scriptamat.2022.114599
M3 - Article
AN - SCOPUS:85124671388
SN - 1359-6462
VL - 213
JO - Scripta Materialia
JF - Scripta Materialia
M1 - 114599
ER -