Mechanical-contact-based submicron-si-waveguide optical microswitch at telecommunication wavelengths

E. Bulgan, Y. Kanamori, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a mechanical-contact-based single-input single-output normally-closed optical microswitch. The switch comprises an input and an identical output waveguide, and a movable low-loss elliptical waveguide driven by a miniature electrostatic comb drive. Movable waveguide closes the lateral gap between input and output waveguides. Mechanical contact of waveguide tip surfaces enables light propagation from the input to the output waveguide through movable elliptical waveguide. Optical property of the switch is studied by Finite Difference Time Domain (FDTD) Analysis. An SOI wafer with 260 nm-thick device-Si and 2 μm-thick buried-oxide layers is utilized in the fabrication. TE-polarized near infrared light at 1.55 μm wavelength is coupled into the input waveguide through an IR objective lens in free-space, and switch is observed with the help of a vidicon camera. Approximately 30±2 dB switching contrast is obtained experimentally at 540 nm lateral switch motion between on and off states.

Original languageEnglish
Title of host publication2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages93-94
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
Duration: 2007 Aug 122007 Aug 16

Publication series

Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
CountryTaiwan, Province of China
CityHualien
Period07/8/1207/8/16

Keywords

  • Mechanical contact
  • Optical microswitch
  • Single mode
  • Submicron waveguide
  • Telecommunication

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Bulgan, E., Kanamori, Y., & Hane, K. (2007). Mechanical-contact-based submicron-si-waveguide optical microswitch at telecommunication wavelengths. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS (pp. 93-94). [4373856] (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373856