TY - JOUR
T1 - Measurements of nonlinear dielectric constants of Pb(Zr,Ti)O3 thin films using a dynamic measuring method
AU - Hiranaga, Yoshiomi
AU - Cho, Yasuo
N1 - Copyright:
Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2013/9
Y1 - 2013/9
N2 - The nonlinear dielectric constants of Pb(Zr,Ti)O3 (PZT) thin films were studied using a dynamic measuring method. The {111}-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol-gel method. The ε333 of the films increased with the Zr concentration in the tetragonal region and reached a maximum value of 280 aF/V close to the morphotropic phase boundary (Zr/Ti = 52/48). This measured value is 400 times larger than that of LiTaO3 single crystals.
AB - The nonlinear dielectric constants of Pb(Zr,Ti)O3 (PZT) thin films were studied using a dynamic measuring method. The {111}-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol-gel method. The ε333 of the films increased with the Zr concentration in the tetragonal region and reached a maximum value of 280 aF/V close to the morphotropic phase boundary (Zr/Ti = 52/48). This measured value is 400 times larger than that of LiTaO3 single crystals.
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U2 - 10.7567/JJAP.52.09KA08
DO - 10.7567/JJAP.52.09KA08
M3 - Article
AN - SCOPUS:84884746129
VL - 52
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 9 PART2
M1 - 09KA08
ER -