Measurements of nonlinear dielectric constants of Pb(Zr,Ti)O3 thin films using a dynamic measuring method

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Abstract

The nonlinear dielectric constants of Pb(Zr,Ti)O3 (PZT) thin films were studied using a dynamic measuring method. The {111}-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol-gel method. The ε333 of the films increased with the Zr concentration in the tetragonal region and reached a maximum value of 280 aF/V close to the morphotropic phase boundary (Zr/Ti = 52/48). This measured value is 400 times larger than that of LiTaO3 single crystals.

Original languageEnglish
Article number09KA08
JournalJapanese journal of applied physics
Volume52
Issue number9 PART2
DOIs
Publication statusPublished - 2013 Sep

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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