Reflectance difference spectroscopy (RDS) was used to measure the component P̃44(ω) of the piezo-optic tensor of Si. RDS was found to have several advantages over the ellipsometric technique, as the method directly measured the irreducible components of the piezo-optic tensor. As the applied stress was small, the Si surface was regarded as an ideally flat reflection plane.
ASJC Scopus subject areas
- Physics and Astronomy(all)