Measurements of a component of the piezo-optic tensor of Si by reflectance difference spectroscopy

Takahiro Mori, Naoto Kumagai, Takashi Hanada, Takafumi Yao, Tetsuji Yasuda

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Reflectance difference spectroscopy (RDS) was used to measure the component P̃44(ω) of the piezo-optic tensor of Si. RDS was found to have several advantages over the ellipsometric technique, as the method directly measured the irreducible components of the piezo-optic tensor. As the applied stress was small, the Si surface was regarded as an ideally flat reflection plane.

Original languageEnglish
Pages (from-to)1458-1460
Number of pages3
JournalJournal of Applied Physics
Volume94
Issue number3
DOIs
Publication statusPublished - 2003 Aug 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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