Measurements of a component of the piezo-optic tensor of Si by reflectance difference spectroscopy

Takahiro Mori; Naoto Kumagai; Takashi Hanada; Takafumi Yao; Tetsuji Yasuda

doi:10.1063/1.1586965

Measurements of a component of the piezo-optic tensor of Si by reflectance difference spectroscopy

Takahiro Mori, Naoto Kumagai, Takashi Hanada, Takafumi Yao, Tetsuji Yasuda

Materials Design Division

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Reflectance difference spectroscopy (RDS) was used to measure the component P̃₄₄(ω) of the piezo-optic tensor of Si. RDS was found to have several advantages over the ellipsometric technique, as the method directly measured the irreducible components of the piezo-optic tensor. As the applied stress was small, the Si surface was regarded as an ideally flat reflection plane.

Original language	English
Pages (from-to)	1458-1460
Number of pages	3
Journal	Journal of Applied Physics
Volume	94
Issue number	3
DOIs	https://doi.org/10.1063/1.1586965
Publication status	Published - 2003 Aug 1

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.1586965

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abstract = "Reflectance difference spectroscopy (RDS) was used to measure the component {\~P}44(ω) of the piezo-optic tensor of Si. RDS was found to have several advantages over the ellipsometric technique, as the method directly measured the irreducible components of the piezo-optic tensor. As the applied stress was small, the Si surface was regarded as an ideally flat reflection plane.",

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AU - Yasuda, Tetsuji

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AB - Reflectance difference spectroscopy (RDS) was used to measure the component P̃44(ω) of the piezo-optic tensor of Si. RDS was found to have several advantages over the ellipsometric technique, as the method directly measured the irreducible components of the piezo-optic tensor. As the applied stress was small, the Si surface was regarded as an ideally flat reflection plane.

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Measurements of a component of the piezo-optic tensor of Si by reflectance difference spectroscopy

Abstract

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