Abstract
Reflectance difference spectroscopy (RDS) was used to measure the component P̃44(ω) of the piezo-optic tensor of Si. RDS was found to have several advantages over the ellipsometric technique, as the method directly measured the irreducible components of the piezo-optic tensor. As the applied stress was small, the Si surface was regarded as an ideally flat reflection plane.
Original language | English |
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Pages (from-to) | 1458-1460 |
Number of pages | 3 |
Journal | Journal of Applied Physics |
Volume | 94 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2003 Aug 1 |
ASJC Scopus subject areas
- Physics and Astronomy(all)