Measurement range expansion of chromatic confocal probe with supercontinuum light source

Hiraku Matsukuma, Ryo Sato, Yuki Shimizu, Wei Gao

Research output: Contribution to journalArticlepeer-review

Abstract

Confocal probes have been widely adopted in vari-ous industries owing to their depth-sectioning effects. A dual-detector differential chromatic confocal probe using a mode-locked femtosecond laser source is proposed herein, and the measurement range expansion of the probe using a supercontinuum light source is discussed. Supercontinuum light has an extremely wide spectrum. A simulation based on wave optics is performed to evaluate the detection sensitivity and measurable range by considering the chromatic aberration of the lens materials. Additionally, an experimental setup is constructed using a supercontinuum light source, and its feasibility is validated. A measurable range of 200 μm is adopted in the experi-ment, and three-dimensional surface profile measurements are performed. However, the developed confo-cal probe has not been used for surface topography measurements. Experiments are conducted to verify the performance of the developed probe.

Original languageEnglish
Pages (from-to)529-536
Number of pages8
JournalInternational Journal of Automation Technology
Volume15
Issue number4
DOIs
Publication statusPublished - 2021

Keywords

  • Chromatic confocal probe
  • Dual-detector
  • Mode-locked laser
  • Profile measurement
  • Supercontinuum

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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