Measurement of thin film permeability by direct contact and optimization

S. Yabukami

doi:10.1063/1.3074230

Measurement of thin film permeability by direct contact and optimization

S. Yabukami

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A highly sensitive method for obtaining the permeability of magnetic film without a limitation of sample size was developed based on the electrical impedance of magnetic film in contact with a copper conductor. The permeability of a CoNbZr thin film (25×25 mm2, 4 μm thick) was evaluated in the frequency range of 10 MHz-4 GHz, the measured values roughly corresponding to those obtained by the Landau-Lifshitz-Gilbert equation. The proposed method shows promise for permeability measurement of wafer-sized samples because the method is free of size limitation.

Original language	English
Article number	07E719
Journal	Journal of Applied Physics
Volume	105
Issue number	7
DOIs	https://doi.org/10.1063/1.3074230
Publication status	Published - 2009
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.3074230

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abstract = "A highly sensitive method for obtaining the permeability of magnetic film without a limitation of sample size was developed based on the electrical impedance of magnetic film in contact with a copper conductor. The permeability of a CoNbZr thin film (25×25 mm2, 4 μm thick) was evaluated in the frequency range of 10 MHz-4 GHz, the measured values roughly corresponding to those obtained by the Landau-Lifshitz-Gilbert equation. The proposed method shows promise for permeability measurement of wafer-sized samples because the method is free of size limitation.",

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AB - A highly sensitive method for obtaining the permeability of magnetic film without a limitation of sample size was developed based on the electrical impedance of magnetic film in contact with a copper conductor. The permeability of a CoNbZr thin film (25×25 mm2, 4 μm thick) was evaluated in the frequency range of 10 MHz-4 GHz, the measured values roughly corresponding to those obtained by the Landau-Lifshitz-Gilbert equation. The proposed method shows promise for permeability measurement of wafer-sized samples because the method is free of size limitation.

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Measurement of thin film permeability by direct contact and optimization

Abstract

ASJC Scopus subject areas

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