TY - JOUR
T1 - Measurement of surface acoustic wave on a quartz ball with proximate electrodes to improve performance of ball surface acoustic wave device
AU - Kai, Satoshi
AU - Ote, Kazunori
AU - Mihara, Tsuyoshi
AU - Ohgi, Tsuneo
AU - Nakaso, Noritaka
AU - Satoh, Ichitaro
AU - Fukiura, Takeshi
AU - Tanaka, Hidekazu
AU - Yamanaka, Kazushi
PY - 2007/7/26
Y1 - 2007/7/26
N2 - In order to improve the performance of ball surface acoustic wave (SAW) devices, we have developed an orientation control apparatus to find the Z axis of a quartz crystal ball by an optical birefringence measurement, and to find the X and Y axes by measuring the propagation characteristics of a SAW using an interdigital transducer (IDT), which is moved close to the ball using a translation stage. The soft spring of the vacuum chuck of the ball manipulator prevented damage to the ball or IDT during the contact. The concave shape of the ball holder of the chuck enabled repeatable alignment of the ball center and the manipulator axis. As a preliminary result, we confirmed that the SAW velocity variation had 60° periodicity and succeeded in identifying the -Y axis-equivalent direction on the quartz ball.
AB - In order to improve the performance of ball surface acoustic wave (SAW) devices, we have developed an orientation control apparatus to find the Z axis of a quartz crystal ball by an optical birefringence measurement, and to find the X and Y axes by measuring the propagation characteristics of a SAW using an interdigital transducer (IDT), which is moved close to the ball using a translation stage. The soft spring of the vacuum chuck of the ball manipulator prevented damage to the ball or IDT during the contact. The concave shape of the ball holder of the chuck enabled repeatable alignment of the ball center and the manipulator axis. As a preliminary result, we confirmed that the SAW velocity variation had 60° periodicity and succeeded in identifying the -Y axis-equivalent direction on the quartz ball.
KW - Ball SAW sensor
KW - Interdigltal transducer
KW - Orientation control apparatus
KW - Surface acoustic wave
KW - Surface wave velocity
UR - http://www.scopus.com/inward/record.url?scp=34547880042&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34547880042&partnerID=8YFLogxK
U2 - 10.1143/JJAP.46.4723
DO - 10.1143/JJAP.46.4723
M3 - Article
AN - SCOPUS:34547880042
VL - 46
SP - 4723
EP - 4725
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 B
ER -