Measurement of surface acoustic wave on a quartz ball with proximate electrodes to improve performance of ball surface acoustic wave device

Satoshi Kai, Kazunori Ote, Tsuyoshi Mihara, Tsuneo Ohgi, Noritaka Nakaso, Ichitaro Satoh, Takeshi Fukiura, Hidekazu Tanaka, Kazushi Yamanaka

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

In order to improve the performance of ball surface acoustic wave (SAW) devices, we have developed an orientation control apparatus to find the Z axis of a quartz crystal ball by an optical birefringence measurement, and to find the X and Y axes by measuring the propagation characteristics of a SAW using an interdigital transducer (IDT), which is moved close to the ball using a translation stage. The soft spring of the vacuum chuck of the ball manipulator prevented damage to the ball or IDT during the contact. The concave shape of the ball holder of the chuck enabled repeatable alignment of the ball center and the manipulator axis. As a preliminary result, we confirmed that the SAW velocity variation had 60° periodicity and succeeded in identifying the -Y axis-equivalent direction on the quartz ball.

Original languageEnglish
Pages (from-to)4723-4725
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number7 B
DOIs
Publication statusPublished - 2007 Jul 26

Keywords

  • Ball SAW sensor
  • Interdigltal transducer
  • Orientation control apparatus
  • Surface acoustic wave
  • Surface wave velocity

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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