Measurement of permeability distribution of magnetic thin film by meander-type probe

Junya Takahashi; Shin Yabukami; Tetsuya Ozawa; Yasunori Miyazawa; Kunio Yanagi; Yutaka Shimada

doi:10.1541/ieejfms.131.511

Measurement of permeability distribution of magnetic thin film by meander-type probe

Junya Takahashi, Shin Yabukami, Tetsuya Ozawa, Yasunori Miyazawa, Kunio Yanagi, Yutaka Shimada

Research output: Contribution to journal › Article › peer-review

Abstract

A highly sensitive and broadband method of obtaining the permeability of magnetic film without limitations in sample size was developed based on the high frequency impedance of microstrip meander probe and magnetic film. The probe (5.6 mm × 5 mm, 2 turns) was scanned in the vicinity of a CoNbZr thin film (50 × 50 mm, 0.1 μm thick), and the permeability was optimized by Newton-Raphson method in a frequency range of 10 MHz - 8 GHz. The measured values roughly corresponded to theoretical values based on the Landau-Lifshitz-Gilbert equation and eddy current generation. The proposed method shows promise for measuring the permeability of wafer-sized samples in-line because it is not restricted by size limitations.

Original language	English
Pages (from-to)	511-516
Number of pages	6
Journal	IEEJ Transactions on Fundamentals and Materials
Volume	131
Issue number	7
DOIs	https://doi.org/10.1541/ieejfms.131.511
Publication status	Published - 2011
Externally published	Yes

Keywords

Magnetic thin film
Meander line
Permeability

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1541/ieejfms.131.511

Cite this

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title = "Measurement of permeability distribution of magnetic thin film by meander-type probe",

abstract = "A highly sensitive and broadband method of obtaining the permeability of magnetic film without limitations in sample size was developed based on the high frequency impedance of microstrip meander probe and magnetic film. The probe (5.6 mm × 5 mm, 2 turns) was scanned in the vicinity of a CoNbZr thin film (50 × 50 mm, 0.1 μm thick), and the permeability was optimized by Newton-Raphson method in a frequency range of 10 MHz - 8 GHz. The measured values roughly corresponded to theoretical values based on the Landau-Lifshitz-Gilbert equation and eddy current generation. The proposed method shows promise for measuring the permeability of wafer-sized samples in-line because it is not restricted by size limitations.",

keywords = "Magnetic thin film, Meander line, Permeability",

author = "Junya Takahashi and Shin Yabukami and Tetsuya Ozawa and Yasunori Miyazawa and Kunio Yanagi and Yutaka Shimada",

year = "2011",

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language = "English",

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pages = "511--516",

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publisher = "The Institute of Electrical Engineers of Japan",

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T1 - Measurement of permeability distribution of magnetic thin film by meander-type probe

AU - Takahashi, Junya

AU - Yabukami, Shin

AU - Ozawa, Tetsuya

AU - Miyazawa, Yasunori

AU - Yanagi, Kunio

AU - Shimada, Yutaka

PY - 2011

Y1 - 2011

N2 - A highly sensitive and broadband method of obtaining the permeability of magnetic film without limitations in sample size was developed based on the high frequency impedance of microstrip meander probe and magnetic film. The probe (5.6 mm × 5 mm, 2 turns) was scanned in the vicinity of a CoNbZr thin film (50 × 50 mm, 0.1 μm thick), and the permeability was optimized by Newton-Raphson method in a frequency range of 10 MHz - 8 GHz. The measured values roughly corresponded to theoretical values based on the Landau-Lifshitz-Gilbert equation and eddy current generation. The proposed method shows promise for measuring the permeability of wafer-sized samples in-line because it is not restricted by size limitations.

AB - A highly sensitive and broadband method of obtaining the permeability of magnetic film without limitations in sample size was developed based on the high frequency impedance of microstrip meander probe and magnetic film. The probe (5.6 mm × 5 mm, 2 turns) was scanned in the vicinity of a CoNbZr thin film (50 × 50 mm, 0.1 μm thick), and the permeability was optimized by Newton-Raphson method in a frequency range of 10 MHz - 8 GHz. The measured values roughly corresponded to theoretical values based on the Landau-Lifshitz-Gilbert equation and eddy current generation. The proposed method shows promise for measuring the permeability of wafer-sized samples in-line because it is not restricted by size limitations.

KW - Magnetic thin film

KW - Meander line

KW - Permeability

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Measurement of permeability distribution of magnetic thin film by meander-type probe

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Keywords

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