Measurement of micrometer order displacement using phase-shift type ultrasonic correlation system in MHz range

Kazuhiko Imano, Hiroshi Inoue

    Research output: Contribution to journalArticle

    7 Citations (Scopus)

    Abstract

    The ultrasonic correlation system was improved to detect a displacement which is much smaller than the wave length of sound, by shifting the phase of the reference wave with respect to the acoustic signal. To investigate the range resolution of the new system, micrometer order displacement was measured using MHz-range ultrasonic waves. Results obtained using the new system show good agreement with the values set by the precision micrometer stage. Range resolution better than λ/300 (1 μm) has been achieved. As an application of the system, the surface topography was also investigated using a 5 MHz focused ultrasonic transducer in the 2-dimensional scanning mode. Surface displacement smaller than λ/10 was successfully imaged.

    Original languageEnglish
    Pages (from-to)3177-3179
    Number of pages3
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume35
    Issue number5 B
    Publication statusPublished - 1996 Dec 1

    Keywords

    • Phase shift method
    • Range resolution
    • Surface topography
    • Ultrasonic correlation method

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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