This paper proposes a method to measure the ac magnetic field distribution in close proximity to a coplanar waveguide (CPW) employing a cantilever tip fabricated for magnetic force microscopy as a sensor. Almost the entire surface of the tip is coated with a magnetically hard film (Co-Cr-Pt), which is magnetized vertically. Herein we focus on the accuracy of the tip image distribution in close proximity of the ac fields from downsized CPWs which, for example, have a signal line as fine as 5 m and ground lines of 50 m. The results suggest that the system has potential as a micron scale RF field detector, although a few technological problems must be solved.
ASJC Scopus subject areas
- Physics and Astronomy(all)