Measurement of local electrical conductivity by four-point probe atomic force microscope technique

Yang Ju; Masumi Saka

doi:10.2472/jsms.56.896

Measurement of local electrical conductivity by four-point probe atomic force microscope technique

Yang Ju, Masumi Saka

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

Abstract

Development of an atomic force microscope (AFM) probe for local electrical conductivity measurement is reviewed. Electrical conductivity of a 99.999% aluminum wire having a 400nm width and a 350nm thickness was measured by the four-point (4P) AFM probe. This technique is a combination of the principles of the four-point-probe method and standard AFM. The instrument is capable of simultaneously measuring both surface topography and local conductivity. The repeatability of conductivity measurements indicates that this 4P-AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.

Original language	English
Pages (from-to)	896-899
Number of pages	4
Journal	Zairyo/Journal of the Society of Materials Science, Japan
Volume	56
Issue number	10
DOIs	https://doi.org/10.2472/jsms.56.896
Publication status	Published - 2007 Oct 1

Keywords

4-Point-probe
Atomic force microscope
Conductivity
Metallic wire

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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abstract = "Development of an atomic force microscope (AFM) probe for local electrical conductivity measurement is reviewed. Electrical conductivity of a 99.999% aluminum wire having a 400nm width and a 350nm thickness was measured by the four-point (4P) AFM probe. This technique is a combination of the principles of the four-point-probe method and standard AFM. The instrument is capable of simultaneously measuring both surface topography and local conductivity. The repeatability of conductivity measurements indicates that this 4P-AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.",

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AB - Development of an atomic force microscope (AFM) probe for local electrical conductivity measurement is reviewed. Electrical conductivity of a 99.999% aluminum wire having a 400nm width and a 350nm thickness was measured by the four-point (4P) AFM probe. This technique is a combination of the principles of the four-point-probe method and standard AFM. The instrument is capable of simultaneously measuring both surface topography and local conductivity. The repeatability of conductivity measurements indicates that this 4P-AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.

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KW - Metallic wire

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