Abstract
Development of an atomic force microscope (AFM) probe for local electrical conductivity measurement is reviewed. Electrical conductivity of a 99.999% aluminum wire having a 400nm width and a 350nm thickness was measured by the four-point (4P) AFM probe. This technique is a combination of the principles of the four-point-probe method and standard AFM. The instrument is capable of simultaneously measuring both surface topography and local conductivity. The repeatability of conductivity measurements indicates that this 4P-AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.
Original language | English |
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Pages (from-to) | 896-899 |
Number of pages | 4 |
Journal | Zairyo/Journal of the Society of Materials Science, Japan |
Volume | 56 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2007 Oct |
Externally published | Yes |
Keywords
- 4-Point-probe
- Atomic force microscope
- Conductivity
- Metallic wire
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering