Measurement of local electrical conductivity by four-point probe atomic force microscope technique

Yang Ju, Masumi Saka

Research output: Contribution to journalArticlepeer-review

Abstract

Development of an atomic force microscope (AFM) probe for local electrical conductivity measurement is reviewed. Electrical conductivity of a 99.999% aluminum wire having a 400nm width and a 350nm thickness was measured by the four-point (4P) AFM probe. This technique is a combination of the principles of the four-point-probe method and standard AFM. The instrument is capable of simultaneously measuring both surface topography and local conductivity. The repeatability of conductivity measurements indicates that this 4P-AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.

Original languageEnglish
Pages (from-to)896-899
Number of pages4
JournalZairyo/Journal of the Society of Materials Science, Japan
Volume56
Issue number10
DOIs
Publication statusPublished - 2007 Oct 1

Keywords

  • 4-Point-probe
  • Atomic force microscope
  • Conductivity
  • Metallic wire

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Measurement of local electrical conductivity by four-point probe atomic force microscope technique'. Together they form a unique fingerprint.

Cite this