Measurement of large low-order aberrations by using a series of through-focus Ronchigrams

Hisanao Akima, Takaho Yoshida

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A method for measuring large aberrations up to second order (defocus, 2-fold astigmatism and axial coma), which uses a through-focus series of Ronchigrams, is proposed. The method is based on the principle that line-focus conditions in Ronchigrams can be locally detected and low-order aberrations can thereby be measured. The proposed method provides auto-tuning of large low-order aberration; in particular, iterative aberration measurement and correction reduce low-order aberrations from several thousand nanometers to less than a few hundred nanometers, which can be handled by conventional fine-aberration tuning methods.

Original languageEnglish
Pages (from-to)325-332
Number of pages8
JournalMicroscopy
Volume63
Issue number4
DOIs
Publication statusPublished - 2014 Aug
Externally publishedYes

Keywords

  • Aberration measurement
  • Auto-tuning
  • Autocorrelation
  • Line-focus
  • Ronchigram
  • STEM

ASJC Scopus subject areas

  • Structural Biology
  • Instrumentation
  • Radiology Nuclear Medicine and imaging

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