Abstract
A method for measuring large aberrations up to second order (defocus, 2-fold astigmatism and axial coma), which uses a through-focus series of Ronchigrams, is proposed. The method is based on the principle that line-focus conditions in Ronchigrams can be locally detected and low-order aberrations can thereby be measured. The proposed method provides auto-tuning of large low-order aberration; in particular, iterative aberration measurement and correction reduce low-order aberrations from several thousand nanometers to less than a few hundred nanometers, which can be handled by conventional fine-aberration tuning methods.
Original language | English |
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Pages (from-to) | 325-332 |
Number of pages | 8 |
Journal | Microscopy |
Volume | 63 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2014 Aug |
Externally published | Yes |
Keywords
- Aberration measurement
- Auto-tuning
- Autocorrelation
- Line-focus
- Ronchigram
- STEM
ASJC Scopus subject areas
- Structural Biology
- Instrumentation
- Radiology Nuclear Medicine and imaging