Measurement of electrical conductivity of micron-scale metallic wires

Bing Feng Ju, Yang Ju, M. Saka

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Electrical conductivities of micron-scale aluminum wires were quantitatively measured by a four-point atomic force microscope (AFM) probe. This technique is a combination of the principles of the four-point probe method and standard AFM. This technique was applied to the 99.999% aluminum wires with 350 nm thickness and different widths of 5.0, 25.0 and 50.0 μm. Since the small dimensions of the wires, the geometrical effects were discussed in details. Experiment results show that the four-point AFM probe is mechanically flexible and robust. The four-point AFM probe technique is capable of measuring surface topography together with local electrical conductivity simultaneously. The repeatable measurements indicate that this technique could be used for fast in-situ electrical properties characterization of sensors and microelectromechanical system devices.

Original languageEnglish
Pages (from-to)s759-s762
JournalTransactions of Nonferrous Metals Society of China (English Edition)
Volume16
Issue numberSUPPL.
DOIs
Publication statusPublished - 2006 Jun

Keywords

  • Atomic force microscope
  • Electrical conductivity
  • Four-point probe
  • Metallic wire

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Geotechnical Engineering and Engineering Geology
  • Metals and Alloys
  • Materials Chemistry

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