Measurement of electric potential distributions around FEG-emitters by electron holography

Tetsuo Oikawa, Joong Jung Kim, Takeshi Tomita, Hyun Soon Park, Daisuke Shindo

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

An evaluation technique for field emission guns (FEG-emitters) was established by using electron holography. For performing electron holography under an applied voltage, a specimen holder with the capabilities of three-directional motion as well as voltage application was developed. An unused Schottky emitter and a used emitter that had failed after operating for about 10 000 h were selected for this study. By visualizing the electric potential distributions around the emitters, it was clarified that a change in the edge shape of the emitter led to the change in the strength of the electric field. The observations revealed that electron holography can be applied to evaluate the performances of the various emitters.

Original languageEnglish
Pages (from-to)171-175
Number of pages5
JournalJournal of Electron Microscopy
Volume56
Issue number5
DOIs
Publication statusPublished - 2007 Oct 1

Keywords

  • Electric potential distribution
  • Electron holography
  • FEG-emitter

ASJC Scopus subject areas

  • Instrumentation

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