Abstract
This paper presents measurement of the angular error motions of a precision linear stage by using a high resolution clinometer in the production process of the stage, where the measurement is repeatedly carried out together with a hand scraping operation for correction of the form errors of the stage guideways. Differing from a conventional autocollimator, the clinometer does not require a reference mirror on the stage since its angle reference is the direction of the gravitational vector. In this paper, two clinometers are employed to measure roll error motion of a linear stage, while eliminating the influences of external vibrations.
| Original language | English |
|---|---|
| Publication status | Published - 2015 Oct 18 |
| Event | 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan Duration: 2015 Oct 18 → 2015 Oct 22 |
Other
| Other | 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 |
|---|---|
| Country/Territory | Japan |
| City | Kyoto |
| Period | 15/10/18 → 15/10/22 |
Keywords
- Capacitive
- Clinometer
- Compensation method
- Fluid
- Inclination measurement
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering