Measurement of angular error motions of a precision linear stage by using a high resolution clinometer

Satoshi Kataoka, Tatsuya Ishikawa, Yuki Shimizu, So Ito, I Ko

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

This paper presents measurement of the angular error motions of a precision linear stage by using a high resolution clinometer in the production process of the stage, where the measurement is repeatedly carried out together with a hand scraping operation for correction of the form errors of the stage guideways. Differing from a conventional autocollimator, the clinometer does not require a reference mirror on the stage since its angle reference is the direction of the gravitational vector. In this paper, two clinometers are employed to measure roll error motion of a linear stage, while eliminating the influences of external vibrations.

Original languageEnglish
Publication statusPublished - 2015 Oct 18
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: 2015 Oct 182015 Oct 22

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period15/10/1815/10/22

Keywords

  • Capacitive
  • Clinometer
  • Compensation method
  • Fluid
  • Inclination measurement

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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