Measurement of an aspherical surface profile on a precision grinding machine

A. Shibuya, Y. Arai, I Ko, Yuki Shimizu, S. Kiyono

Research output: Contribution to conferencePaperpeer-review

Abstract

This paper discusses accurate measurement of aspherical surface profile on a precision grinding machine. It is confirmed that the positioning error of the probes causes a large evaluation error in the case of directly using the two-probe method. To solve this problem, a measurement system of indirectly employing the two-probe method is constructed. Computer simulation results and experimental results of on-machine measurement of the surface profile of an aspherical lens are also presented.

Original languageEnglish
Pages161-164
Number of pages4
Publication statusPublished - 2005 Jan 1
Event5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France
Duration: 2005 May 82005 May 11

Other

Other5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005
CountryFrance
CityMontpellier
Period05/5/805/5/11

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Instrumentation

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