Measurement of a high aspect ratio micro-structured surface by an AFM

J. Aoki, I Ko, S. Kiyono

Research output: Contribution to journalArticlepeer-review

Abstract

This paper presents the measurement of a high aspect ratio micro-structured surface by a precision AFM probe-unit, which consists of an AFM cantilever, a piezoelectric actuator and a linear encoder. A pre-load piezoelectric actuator with a high stiffness is employed to actuate the AFM cantilever over a long stroke of 70μm. A small linear encoder is used for measuring the displacement of the piezoelectric actuator so that AFM probe-unit can be made in a compact size, which is approximately 80×75×150mm. The encoder scale is aligned along the axis of motion of the actuator to avoid the Abbe error. The AFM probe-unit has a resolution of 1nm. Measurement results of micro-structured surface are reported.

Original languageEnglish
JournalVDI Berichte
Issue number1860
Publication statusPublished - 2004 Dec 6
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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