Measurement and deposition of nanometer-scale Cu dot using an atomic force microscope with a nanopipette probe in liquid condition

So Ito, Koji Yamazaki, Futoshi Iwata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, we developed novel techniques of nanometer-scale measurement and deposition using an atomic force microscope (AFM) with a nanopipette in liquid condition. The nanopipette, filled with CuSO 4 electrolyte solution, was employed as the AFM probe. Observation and deposition of nanometer-scale Cu dots were carried out using the nanopipette probe. In order to avoid drying of the nanopipette solution and clogging of the probe-edge aperture, Cu dots were deposited and measured in liquid condition. As for the measurement of the surface, the nanopipette probe was glued on a tuning fork quartz crystal resonator (TF-QCR) to detect a probe oscillation and vertically oscillated to use a method of frequency modulation in tapping-mode AFM. With regard to the deposition of nanometer-scale Cu dot, an electrode wire inside the electrolyte-filled nanopipette and conductive surface of Au coated glass slide were employed as the anode and cathode, respectively. By utilizing the probe-surface distance control during the deposition, nanometerscale Cu dot were successfully deposited on Au surface without the diffusion. Then, the deposited dots were observed by using the nanopipette probe. This technique of the local deposition in the liquid would be applicable for various fields such as fabrication of micro/nanometer-scale devices and arrangement of biological samples.

Original languageEnglish
Title of host publicationSeventh International Symposium on Precision Engineering Measurements and Instrumentation
Volume8321
DOIs
Publication statusPublished - 2011 Dec 1
Event7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China
Duration: 2011 Aug 72011 Aug 11

Other

Other7th International Symposium on Precision Engineering Measurements and Instrumentation
CountryChina
CityLijiang
Period11/8/711/8/11

Keywords

  • frequency modulation AFM
  • liquid condition
  • metal plating
  • nanometer-scale deposition
  • Nanopipette probe

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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