Measurement and control of rolling of a precision moving table

I Ko, Sunao Oyama, Sizhou Zhang, Satoshi Kiyono, Yutaka Uda

Research output: Contribution to conferencePaperpeer-review

11 Citations (Scopus)

Abstract

This paper presents a new system to measure and control rolling of a precision moving table. In this system, the roll error of the table is monitored by a new measuring method, and is controlled to be zero by a feed back control system. The new method utilizes two angle probes to scan the roll angular profile of the surface of a mirror mounted on the table. The output data of the two probes consist of the same roll error and the roll angular profile data with an interval of the probe distance. The roll error and the roll angular profile can then be separated from each other by using the probe output data. Experimental results showed that the roll error can be measured and controlled to a level that is determined by the stability of the angle probes.

Original languageEnglish
Pages70-74
Number of pages5
Publication statusPublished - 1998 Jan 1
EventProceedings of the 1997 IEEE International Conference on Intelligent Processing Systems, ICIPS'97. Part 1 (of 2) - Beijing, China
Duration: 1997 Oct 281997 Oct 31

Other

OtherProceedings of the 1997 IEEE International Conference on Intelligent Processing Systems, ICIPS'97. Part 1 (of 2)
CityBeijing, China
Period97/10/2897/10/31

ASJC Scopus subject areas

  • Computer Science(all)
  • Engineering(all)

Fingerprint Dive into the research topics of 'Measurement and control of rolling of a precision moving table'. Together they form a unique fingerprint.

Cite this