Measurement and compensation of error motions of a diamond turning machine

Wei Gao, Makoto Tano, Takeshi Araki, Satoshi Kiyono, Chun Hong Park

Research output: Contribution to journalArticle

54 Citations (Scopus)

Abstract

This paper describes the measurement and compensation of error motions of a diamond turning machine for nanofabrication of large sinusoidal metrology grids. The diamond turning machine has a T-base design, which consists of a spindle with its rotation axis along the Z-direction and a cross-slide with its movement direction along the X-direction. A fast-tool-servo (FTS) unit is mounted on the X-slide to generate sinusoidal microstructures on a flat workpiece surface mounted on the spindle. The error motions of the X-slide and the spindle, which introduce Z-directional profile errors (out-of-flatness) on the grid surface, are measured and compensated. The out-of-straightness of the X-slide is measured to be approximately 60 nm over a travel of 80 mm by using the reversal method. It is also confirmed that the out-of-straightness of the X-slide has a 10-nm periodic component with a period of 11 mm corresponding to the diameter of the needles used in the roller bearing of the X-slide. The angular motion of the spindle is measured to be approximately 0.3″ by using an autocollimator, which can cause a 73-nm out-of-flatness over a workpiece 100 mm in diameter. The axial motion of the spindle is measured to be approximately 5 nm, which is the smallest error motion. The out-of-flatness of the workpiece is reduced from 0.27 to 0.12 μm through compensating for the error motions by utilizing the FTS unit based on the measurement results of error motions.

Original languageEnglish
Pages (from-to)310-316
Number of pages7
JournalPrecision Engineering
Volume31
Issue number3
DOIs
Publication statusPublished - 2007 Jul 1

Keywords

  • Angular motion
  • Axial motion
  • Compensation
  • Diamond turning machine
  • Error motion
  • Measurement
  • Slide
  • Spindle
  • Straightness

ASJC Scopus subject areas

  • Engineering(all)

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