Mathematical design of linear action masks for binary and ternary composition spread film library

Yukio Yamamoto, Ryota Takahashi, Yuji Matsumoto, Toyohiro Chikyow, Hideomi Koinuma

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Abstract

The use of variation method for mathematical designing of mask patterns for the composition spread film was discussed. The method designs for concurrent fabrication of binary and ternary phase diagrams in which compositions of each component cover the full range of 0% to 100%. The method selects a geometric figure of the mask pattern and then numerically computes the composition gradient. The method also find its usage for the desired superlattice and devise libraries.

Original languageEnglish
Pages (from-to)9-13
Number of pages5
JournalApplied Surface Science
Volume223
Issue number1-3
DOIs
Publication statusPublished - 2004 Feb 15
Externally publishedYes

Keywords

  • Combinatorial technology
  • Composition spread
  • Ternary phase diagram

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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