Materials removal mechanisms in fabrication of microstructures by using ultraprecision cutting-effect of material properties on chip formation

The effect of cutting parameters on machinability of an amorphous nickel-phosphorus (Ni-P) alloy in micro fabrication processes was studied. Burr and chipping generation phenomena in the micro fabric at ion processes of Ni-P were observed and compared with those observed in microfabrication of oxygen-free-copper and aluminum alloy 7075. Experimental results demonstrate that slippages during the chip formation processes play an important role in the burr and chipping generations. Under a condition generating less slippages, the related deformation zone expands and partially protrudes along the tool-passing path. The protruded area remains on edges of generated patterns or removed, which form burrs and chippings, respectively. The deformation expansion decreases the stability of the slippage occurrence, which thus also causes unstable burr and chipping generation. The slippage occurrence in the microfabrication of Ni-P alloy is confirmed to be small, stable, and periodic. All experimental results indicate that Ni-P has an excellent machinability.