TY - JOUR
T1 - Materials removal mechanisms in fabrication of microstructures by using ultraprecision cutting-effect of material properties on chip formation
AU - Kobayashi, Ryuichi
AU - Shimada, Jteita
AU - Mizutani, Masayoshi
AU - Kuriyagawa, Tsunemoto
N1 - Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2017
Y1 - 2017
N2 - The effect of cutting parameters on machinability of an amorphous nickel-phosphorus (Ni-P) alloy in micro fabrication processes was studied. Burr and chipping generation phenomena in the micro fabric at ion processes of Ni-P were observed and compared with those observed in microfabrication of oxygen-free-copper and aluminum alloy 7075. Experimental results demonstrate that slippages during the chip formation processes play an important role in the burr and chipping generations. Under a condition generating less slippages, the related deformation zone expands and partially protrudes along the tool-passing path. The protruded area remains on edges of generated patterns or removed, which form burrs and chippings, respectively. The deformation expansion decreases the stability of the slippage occurrence, which thus also causes unstable burr and chipping generation. The slippage occurrence in the microfabrication of Ni-P alloy is confirmed to be small, stable, and periodic. All experimental results indicate that Ni-P has an excellent machinability.
AB - The effect of cutting parameters on machinability of an amorphous nickel-phosphorus (Ni-P) alloy in micro fabrication processes was studied. Burr and chipping generation phenomena in the micro fabric at ion processes of Ni-P were observed and compared with those observed in microfabrication of oxygen-free-copper and aluminum alloy 7075. Experimental results demonstrate that slippages during the chip formation processes play an important role in the burr and chipping generations. Under a condition generating less slippages, the related deformation zone expands and partially protrudes along the tool-passing path. The protruded area remains on edges of generated patterns or removed, which form burrs and chippings, respectively. The deformation expansion decreases the stability of the slippage occurrence, which thus also causes unstable burr and chipping generation. The slippage occurrence in the microfabrication of Ni-P alloy is confirmed to be small, stable, and periodic. All experimental results indicate that Ni-P has an excellent machinability.
KW - Amorphous alloy
KW - Burr and chipping
KW - Cutting mechanics
KW - Machinability in microfabrication
KW - Ultra-precision cutting
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U2 - 10.2493/jjspe.83.687
DO - 10.2493/jjspe.83.687
M3 - Article
AN - SCOPUS:85021801053
VL - 83
SP - 687
EP - 693
JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
SN - 0912-0289
IS - 7
ER -