TY - JOUR
T1 - Manufacturing silicon carbide microrotors by reactive hot isostatic pressing within micromachined silicon molds
AU - Li, Jing Feng
AU - Sugimoto, Shinya
AU - Tanaka, Shuji
AU - Esashi, Masayoshi
AU - Watanabe, Ryuzo
PY - 2002/1
Y1 - 2002/1
N2 - A novel ceramic microfabrication process-based on the idea of silicon carbide (SIC) reaction sintering within a micromachined silicon mold-has been developed to produce a SiC microroter for miniaturized gas turbines. The new process involves the micromachining of silicon molds; filling the molds with powder mixtures of α-SiC, graphite, and phenol resin; bonding the molds with an adhesive; reaction sintering by hot isostatic pressing (HIP); and the releasing of a reactionsintered workpiece from the mold by wet etching. Using this process, we have successfully fabricated SiC microrotors with a diameter of 5 mm, whose complicated geometry was well transferred from the negative shape of the micromachined silicon mold. The reaction-HIPed SiC ceramics within Si molds showed reasonably good mechanical properties, which are comparable to those of the commercialized reaction-sintered SiC ceramics.
AB - A novel ceramic microfabrication process-based on the idea of silicon carbide (SIC) reaction sintering within a micromachined silicon mold-has been developed to produce a SiC microroter for miniaturized gas turbines. The new process involves the micromachining of silicon molds; filling the molds with powder mixtures of α-SiC, graphite, and phenol resin; bonding the molds with an adhesive; reaction sintering by hot isostatic pressing (HIP); and the releasing of a reactionsintered workpiece from the mold by wet etching. Using this process, we have successfully fabricated SiC microrotors with a diameter of 5 mm, whose complicated geometry was well transferred from the negative shape of the micromachined silicon mold. The reaction-HIPed SiC ceramics within Si molds showed reasonably good mechanical properties, which are comparable to those of the commercialized reaction-sintered SiC ceramics.
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U2 - 10.1111/j.1151-2916.2002.tb00077.x
DO - 10.1111/j.1151-2916.2002.tb00077.x
M3 - Article
AN - SCOPUS:0036343546
VL - 85
SP - 261
EP - 263
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
SN - 0002-7820
IS - 1
ER -