Manufacturing silicon carbide microrotors by reactive hot isostatic pressing within micromachined silicon molds

Jing Feng Li, Shinya Sugimoto, Shuji Tanaka, Masayoshi Esashi, Ryuzo Watanabe

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

A novel ceramic microfabrication process-based on the idea of silicon carbide (SIC) reaction sintering within a micromachined silicon mold-has been developed to produce a SiC microroter for miniaturized gas turbines. The new process involves the micromachining of silicon molds; filling the molds with powder mixtures of α-SiC, graphite, and phenol resin; bonding the molds with an adhesive; reaction sintering by hot isostatic pressing (HIP); and the releasing of a reactionsintered workpiece from the mold by wet etching. Using this process, we have successfully fabricated SiC microrotors with a diameter of 5 mm, whose complicated geometry was well transferred from the negative shape of the micromachined silicon mold. The reaction-HIPed SiC ceramics within Si molds showed reasonably good mechanical properties, which are comparable to those of the commercialized reaction-sintered SiC ceramics.

Original languageEnglish
Pages (from-to)261-263
Number of pages3
JournalJournal of the American Ceramic Society
Volume85
Issue number1
DOIs
Publication statusPublished - 2002 Jan

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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