The effects of ion flux and ion bombardment energy for the nanotube growth were demonstrated. The magnetic field in a magnetron discharge led to the plasma-density increment and the self-bias reduction, yielding the nanotube-growth enhancement. It was found that the ion flux and ion bombardment energy has to be optimized to grow uniform, well-aligned and density controlled nanotubes.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)