Magnetron-type radio-frequency plasma control yielding vertically well-aligned carbon nanotube growth

T. Hirata, N. Satake, G. H. Jeong, T. Kato, R. Hatakeyama, K. Motomiya, K. Tohji

Research output: Contribution to journalArticlepeer-review

57 Citations (Scopus)

Abstract

The effects of ion flux and ion bombardment energy for the nanotube growth were demonstrated. The magnetic field in a magnetron discharge led to the plasma-density increment and the self-bias reduction, yielding the nanotube-growth enhancement. It was found that the ion flux and ion bombardment energy has to be optimized to grow uniform, well-aligned and density controlled nanotubes.

Original languageEnglish
Pages (from-to)1119-1121
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number6
DOIs
Publication statusPublished - 2003 Aug 11

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint

Dive into the research topics of 'Magnetron-type radio-frequency plasma control yielding vertically well-aligned carbon nanotube growth'. Together they form a unique fingerprint.

Cite this