Magnetostrictive performance of electrodeposited TbxDy(1-x)Fey thin film with microcantilever structures

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Abstract

The microfabrication with a magnetostrictive TbxDy(1-x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1-x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.

Original languageEnglish
Article number523
JournalMicromachines
Volume11
Issue number5
DOIs
Publication statusPublished - 2020 May 1

Keywords

  • Electrodeposition
  • Magnetostriction
  • TbDyFe
  • Terfenol-D
  • Thin film

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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