The magnetostriction and magnetic properties of sputtered SmxFe100−x (3≤x≤54) thin films at room temperature were investigated. Films had an amorphous structure for x≥12. The magnetostriction λ of the films increased rapidly under weak fields (<1 kOe) and reached maximum values in the range 130 to 160×10−6 at 16 kOe for x=30 to 40, suggesting that Sm-Fe films can be used in microactuators and sensors. The magnetic properties did not show a clear dependence on the sputtering conditions, such as the input power, Ar gas pressure, or substrate temperature (≤250°C).
ASJC Scopus subject areas
- Engineering (miscellaneous)