Magneto-Impedance of Micromachined Thin Films Less Than 100 \mum in Length

Hiroaki Kikuchi, Takuya Shima, Hiroaki Uetake, Shin Yabukami

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Thin-film type magneto-impedance (MI) elements having widths and thicknesses of several micrometers and lengths less than 100 μm in a rectangular shape were fabricated to reduce the demagnetizing effect. Triangular-type MI elements with sensing parts less than 100 μm in length were also fabricated to facilitate near-field detection with a higher spatial resolution. Rectangular-type elements with widths and lengths of 2 μm and 30 μm, respectively, demonstrate a typical MI profile, whereas an element with a 1 μm width shows a discontinuous impedance change and hysteresis due to incomplete anisotropy control. For the triangular elements, we can suppress the distribution of the demagnetizing factor in the sensing part of the elements and obtain typical MI profiles for 30-100 μm lengths.

Original languageEnglish
Article number7582428
JournalIEEE Magnetics Letters
Volume7
DOIs
Publication statusPublished - 2016 Jan 1
Externally publishedYes

Keywords

  • Magnetic instruments
  • high-frequency applications
  • magnetic films
  • magnetic sensors
  • soft magnetic materials

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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