Magnetic torque driving 2D micro scanner with a non-resonant large scan angle

W. Makishi, Y. Kawai, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

In this paper, a non-resonant 2D optical scanner with extremely large optical scan angle has been reported. A mirror, which is supported with a double-gimbal structure, is inclined by a rotational magnetic torque. Two of four permanent magnets are mounted on the mirror and the gimbal, respectively. The scanning angle of two axis can be controlled independently using external electromagnets. A static drive with maximum optical scan-angle of 118 degree has been achieved.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages904-907
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 11
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 2009 Jun 212009 Jun 25

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09/6/2109/6/25

Keywords

  • 2D scanner
  • Large scan angle
  • Magnet mounting mirror
  • Magnetic torque
  • Non-resonant

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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