Magnetic torque driving 2D micro scanner with a non-resonant large scan angle

Wataru Makishi, Yusuke Kawai, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


In this paper, a non-resonant 2D micro optical scanner with extremely large optical scan angle has been reported for wide field of view in a LASER application. Two pairs of permanent magnets are mounted on the Si mirror and supporting gimbal structure, respectively, to generate large tilting angle without a thermal degradation of the driving property. The scanner can be driven in two- axis independently by a rotational magnetic torque using orthogonal oriented external electromagnets. The maximum optical scan-angle of 118 degree has been achieved with applying 120mA to the electromagnet.

Original languageEnglish
Pages (from-to)135-136
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Issue number4
Publication statusPublished - 2010


  • 2D scanner
  • Large scan angle
  • Magnet mounting mirror
  • Magnetic torque
  • Non-resonant

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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