Magnetic thin-film inductors for RF-integrated circuits

Masahiro Yamaguchi, K. Suezawa, Y. Takahashi, K. I. Arai, S. Kikuchi, Y. Shimada, S. Tanabe, K. Ito

Research output: Contribution to journalConference articlepeer-review

53 Citations (Scopus)

Abstract

Thin-film spiral inductors with micropatterned Fe-Al-O and CoNbZr films for the impedance matching elements in 1 GHz-drive mobile communication handset application have been demonstrated. Narrow slit trains along the easy axis direction control the ferromagnetic resonance frequency through the change of shape anisotropy energy and magnetostatic energy. The inductance was advantageous over the air-core spiral while Q was almost the same.

Original languageEnglish
Pages (from-to)807-810
Number of pages4
JournalJournal of Magnetism and Magnetic Materials
Volume215
DOIs
Publication statusPublished - 2000 Jun 2
Event14th International Symposium on Soft Magnetic Materials (SMM14) - Balatonfured, Hung
Duration: 1999 Sep 81999 Sep 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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