Magnetic sensor based on surface acoustic wave resonators

Michio Kadota, Shigeo Ito, Yoshihiro Ito, Takuo Hada, Kenjiro Okaguchi

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

In this paper, we describe a new type of magnetic surface acoustic wave (SAW) sensor that consists of interdigital transducers made of a magnetostrictive material, Ni, on a quartz substrate. This sensor can be used as an element of a resonator-type wireless SAW sensor system because it has a high Q. Moreover, it has the merits of being fabricated easily using the existing process for SAW devices because its structure is the same as that of general SAW resonators. When an external magnetic field of about 100 mT was applied perpendicularly to the direction of SAW propagation, the frequency change obtained was 200 ppm. In addition, the developed sensor was applied in a passive and wireless open/close sensing system and the reading distance obtained was 3m.

Original languageEnglish
Article number07HD07
JournalJapanese journal of applied physics
Volume50
Issue number7 PART 2
DOIs
Publication statusPublished - 2011 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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