TY - JOUR
T1 - Magnetic sensor based on surface acoustic wave resonators
AU - Kadota, Michio
AU - Ito, Shigeo
AU - Ito, Yoshihiro
AU - Hada, Takuo
AU - Okaguchi, Kenjiro
PY - 2011/7/1
Y1 - 2011/7/1
N2 - In this paper, we describe a new type of magnetic surface acoustic wave (SAW) sensor that consists of interdigital transducers made of a magnetostrictive material, Ni, on a quartz substrate. This sensor can be used as an element of a resonator-type wireless SAW sensor system because it has a high Q. Moreover, it has the merits of being fabricated easily using the existing process for SAW devices because its structure is the same as that of general SAW resonators. When an external magnetic field of about 100 mT was applied perpendicularly to the direction of SAW propagation, the frequency change obtained was 200 ppm. In addition, the developed sensor was applied in a passive and wireless open/close sensing system and the reading distance obtained was 3m.
AB - In this paper, we describe a new type of magnetic surface acoustic wave (SAW) sensor that consists of interdigital transducers made of a magnetostrictive material, Ni, on a quartz substrate. This sensor can be used as an element of a resonator-type wireless SAW sensor system because it has a high Q. Moreover, it has the merits of being fabricated easily using the existing process for SAW devices because its structure is the same as that of general SAW resonators. When an external magnetic field of about 100 mT was applied perpendicularly to the direction of SAW propagation, the frequency change obtained was 200 ppm. In addition, the developed sensor was applied in a passive and wireless open/close sensing system and the reading distance obtained was 3m.
UR - http://www.scopus.com/inward/record.url?scp=79960612374&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79960612374&partnerID=8YFLogxK
U2 - 10.1143/JJAP.50.07HD07
DO - 10.1143/JJAP.50.07HD07
M3 - Article
AN - SCOPUS:79960612374
VL - 50
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 PART 2
M1 - 07HD07
ER -