TY - GEN
T1 - Magnetic properties of FeRh alloy films prepared by ion-beam sputtering
AU - Hashi, S.
AU - Yanase, S.
AU - Okazaki, Y.
AU - Inoue, M.
PY - 2002/1/1
Y1 - 2002/1/1
N2 - The interesting features of equiatomic FeRh alloy with a magnetic phase transition exhibited around room temperature are very useful for micro electrical mechanical system (MEMS) devices. A few studies have been made for the preparation of the ordered FeRh thin films, and they succeeded in the preparation of well-defined films. However, the FeRh films have not been employed in any engineering applications. This is simply because such a sharp transition can only be realized with special conditions: the films deposited on quartz substrates should be annealed in vacuum at 1200°C, or a special substrate such as an MgO single crystal is required. The purpose of this study is the reduction of post annealing temperature to obtain the ordered structure and a relatively sharp magnetic transition on conventional glass or silicon wafer substrates, by using ion-beam sputtering.
AB - The interesting features of equiatomic FeRh alloy with a magnetic phase transition exhibited around room temperature are very useful for micro electrical mechanical system (MEMS) devices. A few studies have been made for the preparation of the ordered FeRh thin films, and they succeeded in the preparation of well-defined films. However, the FeRh films have not been employed in any engineering applications. This is simply because such a sharp transition can only be realized with special conditions: the films deposited on quartz substrates should be annealed in vacuum at 1200°C, or a special substrate such as an MgO single crystal is required. The purpose of this study is the reduction of post annealing temperature to obtain the ordered structure and a relatively sharp magnetic transition on conventional glass or silicon wafer substrates, by using ion-beam sputtering.
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U2 - 10.1109/INTMAG.2002.1000965
DO - 10.1109/INTMAG.2002.1000965
M3 - Conference contribution
AN - SCOPUS:85017215178
T3 - INTERMAG Europe 2002 - IEEE International Magnetics Conference
BT - INTERMAG Europe 2002 - IEEE International Magnetics Conference
A2 - Fidler, J.
A2 - Hillebrands, B.
A2 - Ross, C.
A2 - Weller, D.
A2 - Folks, L.
A2 - Hill, E.
A2 - Vazquez Villalabeitia, M.
A2 - Bain, J. A.
A2 - De Boeck, Jo
A2 - Wood, R.
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
Y2 - 28 April 2002 through 2 May 2002
ER -