Magnetic properties of FeRh alloy films prepared by ion-beam sputtering

S. Hashi, S. Yanase, Y. Okazaki, M. Inoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The interesting features of equiatomic FeRh alloy with a magnetic phase transition exhibited around room temperature are very useful for micro electrical mechanical system (MEMS) devices. A few studies have been made for the preparation of the ordered FeRh thin films, and they succeeded in the preparation of well-defined films. However, the FeRh films have not been employed in any engineering applications. This is simply because such a sharp transition can only be realized with special conditions: the films deposited on quartz substrates should be annealed in vacuum at 1200°C, or a special substrate such as an MgO single crystal is required. The purpose of this study is the reduction of post annealing temperature to obtain the ordered structure and a relatively sharp magnetic transition on conventional glass or silicon wafer substrates, by using ion-beam sputtering.

Original languageEnglish
Title of host publicationINTERMAG Europe 2002 - IEEE International Magnetics Conference
EditorsJ. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780373650, 9780780373655
DOIs
Publication statusPublished - 2002 Jan 1
Externally publishedYes
Event2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

Publication series

NameINTERMAG Europe 2002 - IEEE International Magnetics Conference

Other

Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
CountryNetherlands
CityAmsterdam
Period02/4/2802/5/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

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    Hashi, S., Yanase, S., Okazaki, Y., & Inoue, M. (2002). Magnetic properties of FeRh alloy films prepared by ion-beam sputtering. In J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, & R. Wood (Eds.), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1000965] (INTERMAG Europe 2002 - IEEE International Magnetics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1000965