Magnetic properties of FeRh alloy films prepared by ion-beam sputtering

S. Hashi; S. Yanase; Y. Okazaki; M. Inoue

doi:10.1109/INTMAG.2002.1000965

Magnetic properties of FeRh alloy films prepared by ion-beam sputtering

S. Hashi, S. Yanase, Y. Okazaki, M. Inoue

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The interesting features of equiatomic FeRh alloy with a magnetic phase transition exhibited around room temperature are very useful for micro electrical mechanical system (MEMS) devices. A few studies have been made for the preparation of the ordered FeRh thin films, and they succeeded in the preparation of well-defined films. However, the FeRh films have not been employed in any engineering applications. This is simply because such a sharp transition can only be realized with special conditions: the films deposited on quartz substrates should be annealed in vacuum at 1200°C, or a special substrate such as an MgO single crystal is required. The purpose of this study is the reduction of post annealing temperature to obtain the ordered structure and a relatively sharp magnetic transition on conventional glass or silicon wafer substrates, by using ion-beam sputtering.

Original language	English
Title of host publication	INTERMAG Europe 2002 - IEEE International Magnetics Conference
Editors	J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	0780373650, 9780780373655
DOIs	https://doi.org/10.1109/INTMAG.2002.1000965
Publication status	Published - 2002 Jan 1
Externally published	Yes
Event	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2

Publication series

Name	INTERMAG Europe 2002 - IEEE International Magnetics Conference

Other

Other	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
Country	Netherlands
City	Amsterdam
Period	02/4/28 → 02/5/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Surfaces, Coatings and Films

Access to Document

10.1109/INTMAG.2002.1000965

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Hashi, S., Yanase, S., Okazaki, Y., & Inoue, M. (2002). Magnetic properties of FeRh alloy films prepared by ion-beam sputtering. In J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, & R. Wood (Eds.), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1000965] (INTERMAG Europe 2002 - IEEE International Magnetics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1000965

Magnetic properties of FeRh alloy films prepared by ion-beam sputtering. / Hashi, S.; Yanase, S.; Okazaki, Y.; Inoue, M.

INTERMAG Europe 2002 - IEEE International Magnetics Conference. ed. / J. Fidler; B. Hillebrands; C. Ross; D. Weller; L. Folks; E. Hill; M. Vazquez Villalabeitia; J. A. Bain; Jo De Boeck; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. 1000965 (INTERMAG Europe 2002 - IEEE International Magnetics Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hashi, S, Yanase, S, Okazaki, Y & Inoue, M 2002, Magnetic properties of FeRh alloy films prepared by ion-beam sputtering. in J Fidler, B Hillebrands, C Ross, D Weller, L Folks, E Hill, M Vazquez Villalabeitia, JA Bain, J De Boeck & R Wood (eds), INTERMAG Europe 2002 - IEEE International Magnetics Conference., 1000965, INTERMAG Europe 2002 - IEEE International Magnetics Conference, Institute of Electrical and Electronics Engineers Inc., 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002, Amsterdam, Netherlands, 02/4/28. https://doi.org/10.1109/INTMAG.2002.1000965

Hashi S, Yanase S, Okazaki Y, Inoue M. Magnetic properties of FeRh alloy films prepared by ion-beam sputtering. In Fidler J, Hillebrands B, Ross C, Weller D, Folks L, Hill E, Vazquez Villalabeitia M, Bain JA, De Boeck J, Wood R, editors, INTERMAG Europe 2002 - IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc. 2002. 1000965. (INTERMAG Europe 2002 - IEEE International Magnetics Conference). https://doi.org/10.1109/INTMAG.2002.1000965

Hashi, S. ; Yanase, S. ; Okazaki, Y. ; Inoue, M. / Magnetic properties of FeRh alloy films prepared by ion-beam sputtering. INTERMAG Europe 2002 - IEEE International Magnetics Conference. editor / J. Fidler ; B. Hillebrands ; C. Ross ; D. Weller ; L. Folks ; E. Hill ; M. Vazquez Villalabeitia ; J. A. Bain ; Jo De Boeck ; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. (INTERMAG Europe 2002 - IEEE International Magnetics Conference).

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