TY - JOUR
T1 - Magnetic Properties of Fe-M-O (M=Zr, Hf) Films with High Resistivity
AU - Hayakawa, Y.
AU - Hirokawa, K.
AU - Makino, A.
PY - 1994
Y1 - 1994
N2 - The magnetic properties of Fe-M-O (M=Zr, Hf) films with high electrical resistivity, prepared by the rf magnetron sputtering technique in an Ar+O2 atmosphere, were investigated. In the as-deposited state, low coercivities (Hc) in the range 30 to 100 A/m were obtained for Fe-Hf-O, and 160 to 240 A/m for Fe-Zr-O, in the composition range characterized by an O/M ratio of between 3 and 4. After annealing under optimum conditions in an external field of 160 kA/m, the results obtained for Fe54.9Hf11O34.1 and Fe65.3Zr8.9O25.8 included a saturation magnetization (Bs) of 1.2 T, an Hc of 64 A/m, and a μ at 100 MHz of 1600 for the former, and a Bs of 1.3 T, Hc of 73 A/m and μ at 100 MHz of 1000 for the latter. Further, the electrical resistivities of the films were much higher than those of known metallic soft magnetic films.
AB - The magnetic properties of Fe-M-O (M=Zr, Hf) films with high electrical resistivity, prepared by the rf magnetron sputtering technique in an Ar+O2 atmosphere, were investigated. In the as-deposited state, low coercivities (Hc) in the range 30 to 100 A/m were obtained for Fe-Hf-O, and 160 to 240 A/m for Fe-Zr-O, in the composition range characterized by an O/M ratio of between 3 and 4. After annealing under optimum conditions in an external field of 160 kA/m, the results obtained for Fe54.9Hf11O34.1 and Fe65.3Zr8.9O25.8 included a saturation magnetization (Bs) of 1.2 T, an Hc of 64 A/m, and a μ at 100 MHz of 1600 for the former, and a Bs of 1.3 T, Hc of 73 A/m and μ at 100 MHz of 1000 for the latter. Further, the electrical resistivities of the films were much higher than those of known metallic soft magnetic films.
UR - http://www.scopus.com/inward/record.url?scp=3142738821&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=3142738821&partnerID=8YFLogxK
U2 - 10.1109/TJMJ.1994.4565994
DO - 10.1109/TJMJ.1994.4565994
M3 - Article
AN - SCOPUS:3142738821
VL - 9
SP - 286
EP - 290
JO - IEEE translation journal on magnetics in Japan
JF - IEEE translation journal on magnetics in Japan
SN - 0882-4959
IS - 6
ER -