Magnetic Properties of Fe-Co-Ti Thin Films

F. Sato, T. Miyazaki

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Sputtered (Fe100-YCoY)100-XTix (0≤X≤5, 23≤Y≤53) films were studied with emphasis on the dependence of the soft magnetic properties on composition, annealing temperature and film thickness. After annealing at 823K for 3600 s, the permeability of the film system had a maximum of 1650 at (Fe69Co31)97Ti3. The corresponding saturation magnetic flux density was 2.2 T. When the lattice constant of Fe-Co film expands by about 0.2%, the permeability reaches a maximum; when the film thickness reaches 1357 nm, the permeability decreases to 500. The permeability of an (Fe69Co31)97Ti3/ZnO multilayer film annealed at 773K for 3600 s is 1100; this is about twice the permeability of a single-layer film.

Original languageEnglish
Pages (from-to)88-93
Number of pages6
JournalIEEE Translation Journal on Magnetics in Japan
Issue number5
Publication statusPublished - 1994
Externally publishedYes

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Engineering(all)


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