Magnetic properties and structure of Nd-Fe-B thin films with Cr and Ti underlayers

T. Shima, A. Kamegawa, E. Aoyagi, Y. Hayasaka, H. Fujimori

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)


We investigated the influence of the underlayers of Cr and Ti on the structure and magnetic properties of Nd-Fe-B thin films which were produced by a conventional RF sputtering method. The thickness of the underlayer and the substrate temperature were varied from 0 to 5000 Å and from room temperature to 670°C, respectively. It was found that the type and the thickness of the underlayer materials and the substrate temperature strongly influenced the crystal orientation and magnetic properties. The main crystalline phase was a Nd2Fe14B compound, whose tetragonal c-axis was aligned perpendicularly to the film plane. A high coercive force (Hc = 3.7 kOe) was achieved in the following conditions; Cr underlayer with the thickness of 500 Å and the substrate temperature of 650°C.

Original languageEnglish
Pages (from-to)911-912
Number of pages2
JournalJournal of Magnetism and Magnetic Materials
Issue numberPART 2
Publication statusPublished - 1998 Jan


  • Hard magnetic material
  • High coercivity
  • Nd=Fe-B thin film
  • Sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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