Magnetic micro-actuator

K. Yanagisawa, A. Tago, T. Ohkubo, H. Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

27 Citations (Scopus)

Abstract

The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes.

Original languageEnglish
Title of host publicationProceedings. IEEE Micro Electro Mechanical Systems
PublisherPubl by IEEE
Pages120-124
Number of pages5
ISBN (Print)0879426411
Publication statusPublished - 1991 Jan 1
Externally publishedYes
EventProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 - Nara, Jpn
Duration: 1991 Jan 301991 Feb 2

Publication series

NameProceedings. IEEE Micro Electro Mechanical Systems

Other

OtherProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91
CityNara, Jpn
Period91/1/3091/2/2

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Yanagisawa, K., Tago, A., Ohkubo, T., & Kuwano, H. (1991). Magnetic micro-actuator. In Proceedings. IEEE Micro Electro Mechanical Systems (pp. 120-124). (Proceedings. IEEE Micro Electro Mechanical Systems). Publ by IEEE.