TY - GEN
T1 - Magnetic micro-actuator
AU - Yanagisawa, K.
AU - Tago, A.
AU - Ohkubo, T.
AU - Kuwano, H.
PY - 1991/1/1
Y1 - 1991/1/1
N2 - The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes.
AB - The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes.
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M3 - Conference contribution
AN - SCOPUS:0025751103
SN - 0879426411
T3 - Proceedings. IEEE Micro Electro Mechanical Systems
SP - 120
EP - 124
BT - Proceedings. IEEE Micro Electro Mechanical Systems
PB - Publ by IEEE
T2 - Proceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91
Y2 - 30 January 1991 through 2 February 1991
ER -