Abstract
The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes.
| Original language | English |
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| Title of host publication | Proceedings. IEEE Micro Electro Mechanical Systems |
| Publisher | Publ by IEEE |
| Pages | 120-124 |
| Number of pages | 5 |
| ISBN (Print) | 0879426411 |
| Publication status | Published - 1991 Jan 1 |
| Externally published | Yes |
| Event | Proceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 - Nara, Jpn Duration: 1991 Jan 30 → 1991 Feb 2 |
Publication series
| Name | Proceedings. IEEE Micro Electro Mechanical Systems |
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Other
| Other | Proceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 |
|---|---|
| City | Nara, Jpn |
| Period | 91/1/30 → 91/2/2 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Yanagisawa, K., Tago, A., Ohkubo, T., & Kuwano, H. (1991). Magnetic micro-actuator. In Proceedings. IEEE Micro Electro Mechanical Systems (pp. 120-124). (Proceedings. IEEE Micro Electro Mechanical Systems). Publ by IEEE.