Magnetic micro-actuator

K. Yanagisawa, A. Tago, T. Ohkubo, H. Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

27 Citations (Scopus)


The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes.

Original languageEnglish
Title of host publicationProceedings. IEEE Micro Electro Mechanical Systems
PublisherPubl by IEEE
Number of pages5
ISBN (Print)0879426411
Publication statusPublished - 1991 Jan 1
Externally publishedYes
EventProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 - Nara, Jpn
Duration: 1991 Jan 301991 Feb 2

Publication series

NameProceedings. IEEE Micro Electro Mechanical Systems


OtherProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91
CityNara, Jpn

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Magnetic micro-actuator'. Together they form a unique fingerprint.

Cite this