Magnetic Field Sensor Based on Hybrid of Magnetostrictive and Piezoelectric Materials

Mohammad Akita Indianto, Masaya Toda, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research, a cantilever with two layers of a magnetostrictive material of iron-gallium (FeGa) film and a piezoelectric material of lead zirconate titanate (PZT) film is fabricated and evaluated as a magnetic field sensor. The characterization of the sensor is based on the vibration of the cantilever under the magnetic field. It is evaluated both optically using laser Doppler vibrometer (LDV) and electrically from the PZT film on the cantilever. High sensitivity performance is shown by the sensor with a value of 4.1 Hz/mT observed from the slope of the magnetic field and frequency relation. This result gives a possibility for local and direct detection of the magnetic field in the micro-scale. It is experimentally demonstrated that the sensor's performance can be improved by reducing the thermal noise by modifying the cantilever's structure.

Original languageEnglish
Title of host publicationIEEE Sensors, SENSORS 2020 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728168012
DOIs
Publication statusPublished - 2020 Oct 25
Event2020 IEEE Sensors, SENSORS 2020 - Virtual, Rotterdam, Netherlands
Duration: 2020 Oct 252020 Oct 28

Publication series

NameProceedings of IEEE Sensors
Volume2020-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference2020 IEEE Sensors, SENSORS 2020
Country/TerritoryNetherlands
CityVirtual, Rotterdam
Period20/10/2520/10/28

Keywords

  • Allan variance
  • Q factor
  • cantilever
  • magnetostrictive
  • piezoelectric
  • resonance frequency

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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