LT/Quartz HAL SAW Resonator with Large LT Thickness over Severalfold Wavelength

Michio Kadota, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A Hetero Acoustic Layer (HAL) surface acoustic wave (SAW) device is a new class of SAW device using a thin LT or LN layer rigidly mounted on a substrate. In the past reports, the LT layer was as thin as 0.13-0.221 (<0.7 μm for 1 GHz devices) to obtain a high impedance ratio (e.g. >80 dB), but this range of thickness is not easy to control in mass-production. In this study, we investigated the design space at larger LT thickness by FEM simulation. In the design space near the conventional one, in-band ripples and/or out-of-band spurious responses are generated. If a 1.4 times thicker Al or Cu electrode is combined with a LT layer thicker than a specific value (1λ for Al and 4λ for Cu), however, the ripples and spurious responses almost disappear and the deterioration of impedance ratio is limited. On the other hand, by using further thicker electrodes, a higher mode of SAW is excited preferentially at 2-2.6 times higher frequency than the fundamental mode.

Original languageEnglish
Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
PublisherIEEE Computer Society
Pages1223-1226
Number of pages4
ISBN (Electronic)9781728145969
DOIs
Publication statusPublished - 2019 Oct
Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
Duration: 2019 Oct 62019 Oct 9

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2019-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period19/10/619/10/9

Keywords

  • HAL SAW
  • LiTaO
  • SAW resonator
  • higher mode
  • impedance ratio
  • quartz
  • thick LT
  • thick electrode

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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  • Cite this

    Kadota, M., & Tanaka, S. (2019). LT/Quartz HAL SAW Resonator with Large LT Thickness over Severalfold Wavelength. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (pp. 1223-1226). [8926135] (IEEE International Ultrasonics Symposium, IUS; Vol. 2019-October). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2019.8926135