LTCC-based three dimensional inductors with nano-ferrite embedded core for one-chip tunable RF systems

Y. C. Lin, F. Gabler, Y. C. Tsai, S. Tanaka, T. Gessner, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this study, anodically-bondable LTCC (low temperature cofired ceramic) technology is applied for forming inductors to realizes three-dimensional configuration, simplify fabrication process and miniaturize device size. Nano-ferrite is embedded as core material to increase performance of the integrated inductors. Design, simulation, fabrication are described and characterized results indicate the potential of using this approach for future one-chip tunable RF systems.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1404-1407
Number of pages4
DOIs
Publication statusPublished - 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/TerritorySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • LTCC
  • RF system
  • integrated inductor
  • micro coil
  • multi-GHz
  • nano material core

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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