@inproceedings{b8b28ca7c1ec48fe8594fbc805302626,
title = "LTCC-based three dimensional inductors with nano-ferrite embedded core for one-chip tunable RF systems",
abstract = "In this study, anodically-bondable LTCC (low temperature cofired ceramic) technology is applied for forming inductors to realizes three-dimensional configuration, simplify fabrication process and miniaturize device size. Nano-ferrite is embedded as core material to increase performance of the integrated inductors. Design, simulation, fabrication are described and characterized results indicate the potential of using this approach for future one-chip tunable RF systems.",
keywords = "LTCC, RF system, integrated inductor, micro coil, multi-GHz, nano material core",
author = "Lin, {Y. C.} and F. Gabler and Tsai, {Y. C.} and S. Tanaka and T. Gessner and M. Esashi",
year = "2013",
doi = "10.1109/Transducers.2013.6627041",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "1404--1407",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}