Lowerature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

Z. J. Wang; Z. P. Cao; Y. Otsuka; N. Yoshikawa; Hiroyuki Kokawa; Shoji Taniguchi

doi:10.1063/1.2938876

Lowerature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

Z. J. Wang, Z. P. Cao, Y. Otsuka, N. Yoshikawa, Hiroyuki Kokawa, Shoji Taniguchi

Research output: Contribution to journal › Article › peer-review

42 Citations (Scopus)

Abstract

Pb (Zr_xTi_1-x)O₃ (PZT) thin films were coated on PtTiSiO₂Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 °C, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 °C. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures.

Original language	English
Article number	222905
Journal	Applied Physics Letters
Volume	92
Issue number	22
DOIs	https://doi.org/10.1063/1.2938876
Publication status	Published - 2008 Jun 13

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Lowerature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation",

abstract = "Pb (ZrxTi1-x)O3 (PZT) thin films were coated on PtTiSiO2Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 °C, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 °C. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures.",

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T1 - Lowerature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

AU - Wang, Z. J.

AU - Cao, Z. P.

AU - Otsuka, Y.

AU - Yoshikawa, N.

AU - Kokawa, Hiroyuki

AU - Taniguchi, Shoji

PY - 2008/6/13

Y1 - 2008/6/13

N2 - Pb (ZrxTi1-x)O3 (PZT) thin films were coated on PtTiSiO2Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 °C, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 °C. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures.

AB - Pb (ZrxTi1-x)O3 (PZT) thin films were coated on PtTiSiO2Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 °C, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 °C. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures.

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Lowerature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

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