Low-temperature synthesis of single-phase barium strontium titanate thin film with a nm-seeding technique and its dielectric properties

Yoshio Kobayashi; Yusuke Iizuka; Tomokazu Tanase; Mikio Konno

doi:10.1007/s10971-005-6382-y

Low-temperature synthesis of single-phase barium strontium titanate thin film with a nm-seeding technique and its dielectric properties

Yoshio Kobayashi, Yusuke Iizuka, Tomokazu Tanase, Mikio Konno

ENG - Chemical Engineering

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

Dielectric barium strontium titanate (Ba_0.5Sr _0.5TiO₃ BST) thin films containing crystalline seeds of BST nanoparticles were prepared on indium titanium oxide (ITO) glass electrodes with a complex alkoxide precursor method. BST precursor solution that dispersed the BST particles was spin-coated on the electrode and annealed at various temperatures. Thickness of the film was about 300 nm and BST particle concentration in the film was varied from 0 to 17 mol%. An unseeded BST film was crystallized into a perovskite structure by annealing at 600°C while the seeding with the 17 mol%-BST particles promoted crystalline growth of BST perovskite and lowered crystallization temperature of the films to 525°C. Measurement of dielectric properties at 1 kHz showed that the 4.9 mol% BST-seeded film annealed at 600°C had a relative dielectric constant of 303 which was higher than that of the unseeded BST film.

Original language	English
Pages (from-to)	315-321
Number of pages	7
Journal	Journal of Sol-Gel Science and Technology
Volume	33
Issue number	3
DOIs	https://doi.org/10.1007/s10971-005-6382-y
Publication status	Published - 2005 Mar 1

Keywords

Barium strontium titanates
Dielectric properties
Films
Sol-gel processes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Chemistry(all)
Biomaterials
Condensed Matter Physics
Materials Chemistry

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title = "Low-temperature synthesis of single-phase barium strontium titanate thin film with a nm-seeding technique and its dielectric properties",

abstract = "Dielectric barium strontium titanate (Ba0.5Sr 0.5TiO3 BST) thin films containing crystalline seeds of BST nanoparticles were prepared on indium titanium oxide (ITO) glass electrodes with a complex alkoxide precursor method. BST precursor solution that dispersed the BST particles was spin-coated on the electrode and annealed at various temperatures. Thickness of the film was about 300 nm and BST particle concentration in the film was varied from 0 to 17 mol%. An unseeded BST film was crystallized into a perovskite structure by annealing at 600°C while the seeding with the 17 mol%-BST particles promoted crystalline growth of BST perovskite and lowered crystallization temperature of the films to 525°C. Measurement of dielectric properties at 1 kHz showed that the 4.9 mol% BST-seeded film annealed at 600°C had a relative dielectric constant of 303 which was higher than that of the unseeded BST film.",

keywords = "Barium strontium titanates, Dielectric properties, Films, Sol-gel processes",

author = "Yoshio Kobayashi and Yusuke Iizuka and Tomokazu Tanase and Mikio Konno",

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T1 - Low-temperature synthesis of single-phase barium strontium titanate thin film with a nm-seeding technique and its dielectric properties

AU - Kobayashi, Yoshio

AU - Iizuka, Yusuke

AU - Tanase, Tomokazu

AU - Konno, Mikio

PY - 2005/3/1

Y1 - 2005/3/1

N2 - Dielectric barium strontium titanate (Ba0.5Sr 0.5TiO3 BST) thin films containing crystalline seeds of BST nanoparticles were prepared on indium titanium oxide (ITO) glass electrodes with a complex alkoxide precursor method. BST precursor solution that dispersed the BST particles was spin-coated on the electrode and annealed at various temperatures. Thickness of the film was about 300 nm and BST particle concentration in the film was varied from 0 to 17 mol%. An unseeded BST film was crystallized into a perovskite structure by annealing at 600°C while the seeding with the 17 mol%-BST particles promoted crystalline growth of BST perovskite and lowered crystallization temperature of the films to 525°C. Measurement of dielectric properties at 1 kHz showed that the 4.9 mol% BST-seeded film annealed at 600°C had a relative dielectric constant of 303 which was higher than that of the unseeded BST film.

AB - Dielectric barium strontium titanate (Ba0.5Sr 0.5TiO3 BST) thin films containing crystalline seeds of BST nanoparticles were prepared on indium titanium oxide (ITO) glass electrodes with a complex alkoxide precursor method. BST precursor solution that dispersed the BST particles was spin-coated on the electrode and annealed at various temperatures. Thickness of the film was about 300 nm and BST particle concentration in the film was varied from 0 to 17 mol%. An unseeded BST film was crystallized into a perovskite structure by annealing at 600°C while the seeding with the 17 mol%-BST particles promoted crystalline growth of BST perovskite and lowered crystallization temperature of the films to 525°C. Measurement of dielectric properties at 1 kHz showed that the 4.9 mol% BST-seeded film annealed at 600°C had a relative dielectric constant of 303 which was higher than that of the unseeded BST film.

KW - Barium strontium titanates

KW - Dielectric properties

KW - Films

KW - Sol-gel processes

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