Low-temperature synthesis of single-phase barium strontium titanate thin film with a nm-seeding technique and its dielectric properties

Yoshio Kobayashi, Yusuke Iizuka, Tomokazu Tanase, Mikio Konno

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

Dielectric barium strontium titanate (Ba0.5Sr 0.5TiO3 BST) thin films containing crystalline seeds of BST nanoparticles were prepared on indium titanium oxide (ITO) glass electrodes with a complex alkoxide precursor method. BST precursor solution that dispersed the BST particles was spin-coated on the electrode and annealed at various temperatures. Thickness of the film was about 300 nm and BST particle concentration in the film was varied from 0 to 17 mol%. An unseeded BST film was crystallized into a perovskite structure by annealing at 600°C while the seeding with the 17 mol%-BST particles promoted crystalline growth of BST perovskite and lowered crystallization temperature of the films to 525°C. Measurement of dielectric properties at 1 kHz showed that the 4.9 mol% BST-seeded film annealed at 600°C had a relative dielectric constant of 303 which was higher than that of the unseeded BST film.

Original languageEnglish
Pages (from-to)315-321
Number of pages7
JournalJournal of Sol-Gel Science and Technology
Volume33
Issue number3
DOIs
Publication statusPublished - 2005 Mar 1

Keywords

  • Barium strontium titanates
  • Dielectric properties
  • Films
  • Sol-gel processes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry

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