Low-temperature synthesis and dielectric properties of single-phase lead zirconate titanate thin film with a nano particle seeding technique

Tomokazu Tanase, Yoshio Kobayashi, Takao Miwa, Mikio Konno

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

The low temperature synthetic method, which combines chemical solution deposition and nm-seeding technique, was applied to the fabrication of lead zirconate titanate (PZT) thin films. Nano-crystallines of barium strontium titanate (BST) particles were prepared by the hydrolysis reaction of the complex alkoxides. PZT precursor solutions containing the BST particles were spin-coated on Pt/Ti/SiO2Si substrates to film thickness of 500-800 nm at particle concentrations of 0 - 25.1 mol%, and annealed at various temperatures. Seeding of BST particles prevented the formation of pyrochlore phases, which appeared at temperatures above 400 °C in unseeded PZT films, and crystallized PZT into perovskite structures at 420 °C, which was more than 100 °C below the crystallization temperature of the unseeded PZT films. Measurement of dielectric properties at 1 kHz showed that the 25.1 mol% BST-seeded PZT films annealed at 450 °C had a dielectric constant as high as 300 with a dissipation factor of 0.05. Leakage current density of the film was less than 1×10-66 A/cm2 at applied electric field from 0 to 64 kV/cm.

Original languageEnglish
Pages (from-to)151-156
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume784
Publication statusPublished - 2003 Dec 1
EventFerroelectric Thin Films XII - Boston, MA, United States
Duration: 2003 Dec 12003 Dec 4

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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