Low-temperature silicon selective deposition and epitaxy on silicon using the thermal decomposition of silane under ultraclean environment

Junichi Murota, Naoto Nakamura, Manabu Kato, Nobuo Mikoshiba, Tadahiro Ohmi

Research output: Contribution to journalArticlepeer-review

132 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Low-temperature silicon selective deposition and epitaxy on silicon using the thermal decomposition of silane under ultraclean environment'. Together they form a unique fingerprint.

Physics & Astronomy