TY - JOUR
T1 - Low-temperature recrystallization of ferroelectric lead zirconate titanate thin films on glass substrate using continuous-wave green laser
AU - Kuroki, Shin Ichiro
AU - Tago, Kiichiro
AU - Kotani, Koji
AU - Ito, Takashi
PY - 2009/4/1
Y1 - 2009/4/1
N2 - A continuous-wave (CW) green laser with the wavelength of 532nm was employed to crystallize lead zirconate titanate (PZT) films on glass substrates. The firing was local and instantaneous, and annealing time (10 -5-10-1 s) was controlled by adjusting the laser scanning speed. After CW green laser annealing, three typical crystallization modes of the PZT thin films were observed, that is, microcrystallization, island crystallization, and lateral crystallization. In the island crystal region, the PZT film was crystallized uniformly and sufficiently over the thin films, and the ferroelectric perovskite c-axis (001) was dominant. In this region the remanent polarization of 13 μC/cm2 was achieved.
AB - A continuous-wave (CW) green laser with the wavelength of 532nm was employed to crystallize lead zirconate titanate (PZT) films on glass substrates. The firing was local and instantaneous, and annealing time (10 -5-10-1 s) was controlled by adjusting the laser scanning speed. After CW green laser annealing, three typical crystallization modes of the PZT thin films were observed, that is, microcrystallization, island crystallization, and lateral crystallization. In the island crystal region, the PZT film was crystallized uniformly and sufficiently over the thin films, and the ferroelectric perovskite c-axis (001) was dominant. In this region the remanent polarization of 13 μC/cm2 was achieved.
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U2 - 10.1143/JJAP.48.04C142
DO - 10.1143/JJAP.48.04C142
M3 - Article
AN - SCOPUS:77952481106
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 4 PART 2
M1 - 04C142
ER -