A continuous-wave (CW) green laser with the wavelength of 532nm was employed to crystallize lead zirconate titanate (PZT) films on glass substrates. The firing was local and instantaneous, and annealing time (10 -5-10-1 s) was controlled by adjusting the laser scanning speed. After CW green laser annealing, three typical crystallization modes of the PZT thin films were observed, that is, microcrystallization, island crystallization, and lateral crystallization. In the island crystal region, the PZT film was crystallized uniformly and sufficiently over the thin films, and the ferroelectric perovskite c-axis (001) was dominant. In this region the remanent polarization of 13 μC/cm2 was achieved.
ASJC Scopus subject areas
- Physics and Astronomy(all)