Low temperature processing of crystalline lead zirconate titanate (PZT) film and the direct micropatterning by laser-induced pyrolysis of a sol-gel-derived film

Akira Watanabe, Tomokazu Tanase, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

Research output: Contribution to journalLetterpeer-review

15 Citations (Scopus)

Abstract

A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume42
Issue number7 B
Publication statusPublished - 2003 Jul 15

Keywords

  • Laser-induced pyrolysis
  • Lead zirconate titanate
  • Low-temperature processing
  • Micro-Raman spectroscopy
  • Micropattering
  • Sol-gel

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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