Low-temperature large-grain poly-Si direct deposition by microwave plasma enhanced chemical vapor deposition using SiH4/Xe

Wataru Shindo, Shigefumi Sakai, Hiroaki Tanaka, Chuan Jie Zhong, Tadahiro Ohmi

    Research output: Contribution to journal › Article › peer-review

    13 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Low-temperature large-grain poly-Si direct deposition by microwave plasma enhanced chemical vapor deposition using SiH<sub>4</sub>/Xe'. Together they form a unique fingerprint.

    Chemical Compounds

    Engineering & Materials Science

    Physics & Astronomy