Low-temperature InGaAs oxidation using oxygen neutral beam

Chang Yong Lee, Akio Higo, Cédric Thomas, Takeru Okada, Takuya Ozaki, Masakazu Sugiyama, Yoshiaki Nakano, Seiji Samukawa

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Low-temperature InGaAs oxidation using oxygen neutral beam'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy