Low-temperature heteroepitaxial growth of 3C-SiC(111) on Si(110) substrate using monomethylsilane

Atsushi Konno, Yuzuru Narita, Takashi Ito, Kanji Yasui, Hideki Nakazawa, Tetsuo Endoh, Maki Suemitsu

Research output: Contribution to journalConference articlepeer-review

16 Citations (Scopus)

Fingerprint Dive into the research topics of 'Low-temperature heteroepitaxial growth of 3C-SiC(111) on Si(110) substrate using monomethylsilane'. Together they form a unique fingerprint.

Engineering & Materials Science